Semiconductor Training
Professional training is an important enabler for our customers, to make sure that the skills and knowledge exist within your operation to get the best machine performance and cost of ownership.
memsstar technical training takes place at the customer site, and is delivered after careful consultation to identify the correct training products for your business needs.
Target Audience
Operators, maintenance technicians, equipment engineers, process engineers, development engineers, and health & safety practitioners. Courses include up to 8 students per class, with training ideally split between classroom and access to equipment.
Training Material
All of our training material is created by memsstar based upon our wealth of experience and knowledge, and is delivered by fully qualified and certified technical trainers. Students will receive hard and soft copy of materials, and can be assessed during training if required. Attainment certification will be supplied.
Semiconductor Training Course Structure
Customers select a platform and/or chambers as the subject of the course, and then a level to which the training is targeted, and finally which modules should be included.
Platforms | |
---|---|
150mm, 200mm AMAT – P5000, Centura, Endura Lam – Rainbow, Alliance Novellus – Concept One (C1), Concept Two (C2) |
300mm Endura/Endura 2 |
Basic operation and basic theory
Level 1 – Basic maintenance and preventative maintenance
Level 2 – Advanced maintenance and fault finding
150mm/200mm
Module |
Days |
Comments |
Tungsten | 1 | Basic |
Tantalum (Nitride) |
1 | All variations |
Copper | 1 | All variations |
Titanium (Nitride) |
1 | All variations |
Preclean | 1 | |
Reactive Preclean | 1 | |
CVD TiN TxZ | 2 | Purge, cool down, major PM |
Mainframe | 2 | |
HP+/VHP+ Robot | 2 | Handoffs, full bearing PM |
Standard/WB/NB loadlocks | 2 | Setup, fault finding |
Basic Process | 2 | Etch, PVD and CVD |
MxP/MxP+ | 2 | Etch hardware |
DPS | 2 | Etch hardware |
DxZ, DxL | 2 | CVD hardware |
P5000 frame, robot | 3 | All variations, calibrations and setups |
Lam Research Alliance and Rainbow Training
Module |
Days |
Comments |
4420 chamber | 1 | All variations |
4520 chamber | 1 | All variations |
4520 isotropic module | 1 | All variations |
9400 chamber | 1 | All variations |
9600 chamber | 1 | All variations |
DSQ chamber | 2 | |
Basic process | 2 | All variations |
Mainframe | 1 | Basic |
Novellus C1 and C2 Training
Module |
Days |
Comments |
C1 mainframe | 1 | Basic |
Process chamber | 1 | All variations |
C1 handling | 1 | All variations |
C2 DLCM | 1 | All variations |
SPEED chamber | 1 | All variations |
ALTUS chamber | 2 | |
Basic process | 2 | All variations |
Applied Materials 300mm Endura/Endura 2 Training
Module |
Days |
Comments |
Clean Tungsten | 1 | |
Aluminium | 1 | |
Cu | 1 | EnCoRell, RFX |
RF PVD | 1 | Variations |
Ti (N) or TA (N) | 1 | SiP, EnCoRe |
PC, RPC | 2 | XT and XTE |
SiCoNi | 2 | Producer |
CVD TxZ | 2 | STAR control |
ALD TaN, TiN | 2 | Centura |
ALPS PVD | 1 | Ni, Pt, Co, NiPt |
Mainframe | 2 | SWLL inc. |
4.0 Fi, 5.3 Fi | 2 | Kens, TDK, Yasakawa, Brooks, Sinfonia |
VHP+ XP | 2 |
For further information on our semiconductor training, please contact us to discuss your requirements.