Remanufactured Systems for MEMS

memsstar delivers a comprehensive portfolio of etch and deposition equipment and know-how for MEMS manufacturing. memsstar uses its expertise in etch and deposition processing in order to repurpose Applied Materials, Lam and Novellus equipment for use in MEMS applications.

memsstar specializes in the repurposing of industry-leading etch and deposition systems:

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Novellus

CVD
Concept One and Concept Two
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Lam Research

Etch
Rainbow, TCP and Alliance
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Applied Materials

Etch, CVD, PVD, RTP, Epi
Centura 5200, Endura 5500 and P5000
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