Production Systems for Volume MEMS Manufacturing
memsstar’s ORBIS™ 1000 and 3000 systems deliver cost-effective lab-to-fab upgrade paths from R&D through to full-scale production. Seamless process transfer allows the single-wafer ORBIS 1000 platform, ideal for low-volume MEMS production environments to be converted and upgraded to a fully automated Orbis 3000 system. With the easy integration of advanced XERIC™ and AURIX™ process modules, fabs can start with just one process module and add future modules to the cluster as capacity, productivity or capability needs require.
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