Micro-Electro-Mechanical Systems (MEMS) device fabrication presents unique challenges for process engineers and their choice of equipment. This is largely due to the three-dimensional (3D) nature and electro-mechanical functioning of MEMS products. In fact, with these additional challenges, a fundamentally different …
MEMS device fabrication requires a broad range of reactions and chemistries to create the structures and functions of these complicated electro-mechanical systems. MEMS etching processes in particular, merit attention for material compatibilities because, of course, the function of etching is …
Fabricating MEMS devices presents unique challenges because of the three-dimensional (3D) and mechanical nature of the products. Specific mechanical structures are needed to perform the MEMS functions that involve vibration, rotation, or other types of motion (Figure 1). To accomplish …
memsstar Ltd., a leading provider of etch and deposition equipment to manufacturers of semiconductors and micro-electrical mechanical systems (MEMS), has received the Texas Instruments (TI) 2017 Supplier Excellence Award. The annual award honors companies whose dedication and commitment in supplying …
In both semiconductor device and microelectromechanical systems (MEMS) manufacturing, wafer processes are generally divided into single wafer and batch processing. As the name implies, batch processing calls for multiple wafers to be processed at the same time. This cost-effective approach …
memsstar’s close collaboration with the University of Edinburgh has resulted in the first in a series of published MEMS research results using memsstar’s MEMS processing system and coating technology. This first article is entitled; “The effect of micropillar spacing and …
In the first part of this series, I covered the perspectives of dimensional scaling vs. heterogeneous integration based on discussions during SEMICON West 2017. For part two, I spoke with equipment and material suppliers who serve either (or in some …
Every year at SEMICON West, in addition to taking in keynotes and technology sessions, I like to catch up with semiconductor suppliers to find out about any significant news, their latest offerings and how they are enabling next-generation manufacturing. Here …
Over the last few years, microelectromechanical systems (MEMS) have moved into the mainstream electronics markets as established technologies, and are experiencing additional growth through software and applications. Whereas 10 years ago MEMS discussions revolved around hammering out the processes, solving …
Biological and environmental sensors offer unique manufacturing challenges beyond those of other MEMS and sensor-based devices. Fundamentally, sensors incorporating merged technologies of this kind can still be considered as two distinct components – a mechanical device with an added bio …