MEMS Dry Processing

Increasingly complex MEMS designs need dry processing.

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Remanufactured Semiconductor Equipment

We specialize in remanufacturing the leading semiconductor etch and deposition systems.

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MEMS Equipment for All Needs

From R&D to high volume manufacturing, our MEMS equipment meets your requirements.

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Yield and Cost Drive MEMS’ Move to Single-Wafer Processing

The case for single-wafer tools that can deposit or etch thinner films and meet more aggressive targets for process uniformity with high yield and repeatability is growing.

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New Download: Yield and Cost Drive MEMS’ Move to Single-Wafer Processing White Paper

Our latest white paper explores the changing needs of MEMS manufacturing, particularly in a market in which demand for 200mm tools is booming for all microelectronics products. Download the white paper to learn more.

memsstar’s deposition and etch expertise supports used semiconductor equipment and proprietary MEMS equipment

memsstar is a leading process and equipment supplier of etch and deposition solutions for semiconductor and MEMS manufacturing processes. Offering in-depth process expertise and a range of new and remanufactured etch and deposition equipment, memsstar provides a full complement of processes and related services for multiple applications.

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MEMS

memsstar leverages its proprietary dry release etch and deposition technology expertise to develop new MEMS equipment as well as to remanufacture semiconductor tools for MEMS processes. Discover how memsstar’s MEMS equipment is advancing next-generation technology.

SEMI

memsstar remanufactures used semiconductor equipment to the original equipment manufacturer’s specification and repurposes it for novel applications to deliver the industry’s best etch and deposition process solutions. Find out more about our semiconductor products and services.

R&D

MEMS researchers from universities, academia and commercial MEMS R&D benefit from memsstar’s single-wafer processing platforms that guarantee excellent HF dry-release etch repeatability with a wide process window to maximise performance and yield. Learn why memsstar is the right choice for MEMS development.

Latest News

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200mm Revitalization: MEMS Ride the Wave

Faced with the semiconductor shortage of 2020-21, semiconductor manufacturers have had to maximize utilization of their existing fab assets, including …

Upcoming Events

Hilton Head 2022

Jun 05 » Jun 09

The 20th in the series of Hilton Head Workshops on the science and technology of solid-state sensors, actuators, and microsystems will take place June 5 – 9, 2022 at the Sonesta Resort on Hilton Head Island, SC. This exciting multidisciplinary event has occurred biennially since 1984. Hilton Head Island, the beachfront workshop hotel, and the casual, comfortable, seaside environment with nearly all meals included allows for relaxed exchanges, collegial interactions, and many fruitful discussions. The Hilton Head Workshop has historically been a regional meeting restricted to professionals living in North or South America as well as past attendees of previous Hilton Head Workshops. Beginning in 2020, the meeting opened to international colleagues beyond the Americas. We continue to welcome researchers worldwide to submit high-quality abstracts (contributed and late news) for consideration by the submission deadlines.

The Hilton Head Workshop draws 350-500 academic, industry, and government participants from diverse engineering and scientific backgrounds, including chemistry, materials science, chemical engineering, electrical engineering, mechanical engineering, physics, biology, bioengineering, etc. Given the events of the past year and in consideration of future science and technology directions, HH 2022’s workshop theme will continue the great work in this direction with a focus on “Preparation and Prevention: Tackling our Grand Challenges,” which we hope will inspire our community, encourage new collaborations and ideas, and explore the potential for MicroElectroMechanical Systems (MEMS) to impact a variety of global issues and grand challenges.

Sonesta Resort
130 Shipyard Drive
Hilton Head Island, SC 29928
Phone: 1-843-842-2400
Fax 1-843-842-6503

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