Semiconductor
memsstar is a premier semiconductor equipment remanufacturer and services provider. The company refurbishes and re-manufactures tools to the original equipment manufacturer’s specification, as well as repurposes those tools for novel applications, to deliver the industry’s best etch and deposition process solutions. Find out more about our semiconductor products and services.
MEMS
memsstar serves the global MEMS marketplace, offering etch and deposition expertise, experience, proprietary and remanufactured systems and know-how to deliver innovative products and services for research, commercial R&D and production. Discover how our MEMS technology can help your business.
ORBIS™ ALPHA™ Platform:
Standalone process module
ORBIS ALPHA HF and XeF2 etch development platform
ORBIS™ 1000 platform:
Single wafer vacuum loadlock
ORBIS 1000 single-chamber platform for low-volume MEMS production
ORBIS™ 3000 platform:
Single cassette cluster tool
ORBIS 3000 multi-chamber platform proven in high-volume MEMS manufacturing
Applied Materials™
P5000, Centura and Endura
memsstar specializes in remanufactured Applied Materials etch and deposition platforms
Lam Research:
Rainbow and Alliance
memsstar specializes in remanufactured Lam Research etch platforms
Novellus:
Concept One and Concept Two
memsstar specializes in remanufactured Novellus deposition platforms
