MEMS in the World

MEMS technology is changing the way we sense and control our environment, making reliable, integrated MEMS more critical than ever.

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Making the IoT Possible

Connecting 50B devices by 2020 means cost-effectively manufacturing MEMS, sensors and ICs in high volumes.

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Ready for the Future

The possibilities are endless, thanks to advanced MEMS technology in development at universities and research institutes around the world.

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2017 Supplier Excellence Award

memsstar Recognized by Texas Instruments with 2017 Supplier Excellence Award

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memsstar’s deposition and etch expertise supports used semiconductor equipment and proprietary MEMS equipment

memsstar is a leading process and equipment supplier of etch and deposition solutions for semiconductor and MEMS manufacturing processes. Offering in-depth process expertise and a range of new and remanufactured etch and deposition equipment, memsstar provides a full complement of processes and related services for multiple applications.

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memsstar leverages its proprietary dry release etch and deposition technology expertise to develop new MEMS equipment as well as to remanufacture semiconductor tools for MEMS processes. Discover how memsstar’s MEMS equipment is advancing next-generation technology.


memsstar remanufactures used semiconductor equipment to the original equipment manufacturer’s specification and repurposes it for novel applications to deliver the industry’s best etch and deposition process solutions. Find out more about our semiconductor products and services.


MEMS researchers from universities, academia and commercial MEMS R&D benefit from memsstar’s single-wafer processing platforms that guarantee excellent HF dry-release etch repeatability with a wide process window to maximise performance and yield. Learn why memsstar is the right choice for MEMS development.

Latest News

HF acid etch vs HF vapour etch

HF Acid Etch vs HF Vapor Etch

In a previous blog post, Dr. Daniel Drysdale described some of the current methods for MEMS manufacturing from an etch perspective, from wet etching and its evolution, to the current suite of dry release technologies. We looked at the pros …

Upcoming Events

MEMS 2019

Jan 27

The 32nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2019) is one of the premier annual events reporting research results on every aspect of Microsystems technology. This Conference reflects from the rapid proliferation of the commitment and success of the Microsystems research community. In recent years, the IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has created the forum to present over 200 select papers in podium and poster/oral sessions. Its single-session format provides ample opportunity for interaction between attendees, presenters and exhibitors. MEMS 2019 will be held in Seoul, Korea, from 27-31 January 2019.

memsstar will exhibit in booth #36.