MEMS Dry Processing

Increasingly complex MEMS designs need dry processing.

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Remanufactured Semiconductor Equipment

We specialize in remanufacturing the leading semiconductor etch and deposition systems.

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MEMS Equipment for All Needs

From R&D to high volume manufacturing, our MEMS equipment meets your requirements.

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Troubled by Stiction in your MEMS Etch Release Process?

In MEMS manufacturing, the etch release process puts the “mechanical” in MEMS devices. Without it, vibration, rotation, or other movement doesn’t happen.

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New Download: Yield and Cost Drive MEMS’ Move to Single-Wafer Processing White Paper

Our latest white paper explores the changing needs of MEMS manufacturing, particularly in a market in which demand for 200mm tools is booming for all microelectronics products. Download the white paper to learn more.

memsstar’s deposition and etch expertise supports used semiconductor equipment and proprietary MEMS equipment

memsstar is a leading process and equipment supplier of etch and deposition solutions for semiconductor and MEMS manufacturing processes. Offering in-depth process expertise and a range of new and remanufactured etch and deposition equipment, memsstar provides a full complement of processes and related services for multiple applications.

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MEMS

memsstar leverages its proprietary dry release etch and deposition technology expertise to develop new MEMS equipment as well as to remanufacture semiconductor tools for MEMS processes. Discover how memsstar’s MEMS equipment is advancing next-generation technology.

SEMI

memsstar remanufactures used semiconductor equipment to the original equipment manufacturer’s specification and repurposes it for novel applications to deliver the industry’s best etch and deposition process solutions. Find out more about our semiconductor products and services.

R&D

MEMS researchers from universities, academia and commercial MEMS R&D benefit from memsstar’s single-wafer processing platforms that guarantee excellent HF dry-release etch repeatability with a wide process window to maximise performance and yield. Learn why memsstar is the right choice for MEMS development.

Latest News

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200mm Revitalization: MEMS Ride the Wave

Faced with the semiconductor shortage of 2020-21, semiconductor manufacturers have had to maximize utilization of their existing fab assets, including …

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