memsstar is a premier semiconductor equipment remanufacturer and services provider. The company refurbishes and re-manufactures tools to the original equipment manufacturer’s specification, as well as repurposes those tools for novel applications, to deliver the industry’s best etch and deposition process solutions. Find out more about our semiconductor products and services.



memsstar serves the global MEMS marketplace, offering etch and deposition expertise, experience, proprietary and remanufactured systems and know-how to deliver innovative products and services for research, commercial R&D and production. Discover how our MEMS technology can help your business.

  • Single Wafer vs Batch Wafer Processing

    In both semiconductor device and microelectromechanical systems (MEMS) manufacturing, wafer processes are generally divided into single wafer and batch processing. As the name implies, batch processing calls for multiple wafers to be processed at the same time. This cost-effective approach …
    Read more

ORBIS™ ALPHA™ Platform:
Standalone process module

ORBIS ALPHA HF and XeF2 etch development platform


ORBIS™ 1000 platform:
Single wafer vacuum loadlock

ORBIS 1000 single-chamber platform for low-volume MEMS production

ORBIS 1000

ORBIS™ 3000 platform:
Single cassette cluster tool

ORBIS 3000 multi-chamber platform proven in high-volume MEMS manufacturing


Applied Materials™
P5000, Centura and Endura

memsstar specializes in remanufactured Applied Materials etch and deposition platforms


Lam Research:
Rainbow and Alliance

memsstar specializes in remanufactured Lam Research etch platforms


Concept One and Concept Two

memsstar specializes in remanufactured Novellus deposition platforms