Novellus
memsstar Specializes in Novellus Concept One and Concept Two Deposition Platforms
As the leading remanufacturer of Novellus process equipment serving the European, Asian and USA markets, memsstar delivers the broadest capability set for the like-new refurbishing, repurposing or process development to support etch and deposition processes for mainstream semiconductor manufacturing or novel applications.
Novellus Systems
Concept One Applications
Dielectric CVD
TEOS
Tungsten CVD
PECVD, CVD
Concept One and Concept Two
Concept Two Applications
Altus Tungsten
Sequel Dielectric
SPEED Gap Fill
memsstar supports Concept One and Concept Two:
- Equipment support, process development, expert consulting
- Chamber additions, moves, wafer size changes
- Process retargeting and applications design
- Asset management
- Spare parts inventory
- Training
- CE EH&S engineering
- Complete installations, start up and process support, including full warranty
- On-site service
