ORBIS™ 1000 Platform
memsstar’s ORBIS™ 1000 platform is a single-wafer vacuum loadlock ideal for low-volume MEMS production environments. ORBIS 1000 features fully automated processing that dramatically improves cycle time between wafers, providing the ideal level of productivity for commercial development and low-volume production. Once demand increases, the ORBIS 1000 platform can be converted and upgraded to a fully automated ORBIS™ 3000 system without losing your original process module (PM) investment.
The ORBIS 1000 integrates with both the XERIC™ and AURIX™ process modules. Each process module uses a small-volume vacuum chamber that can process all standard substrate sizes—100mm, 125mm, 150mm, 200mm—as well as many different types of carriers. Chambers are process-specific, with an optimized process kit for each process, all featuring memsstar’s superior control.
ORBIS 1000 Key Features
- Provides high reliability in a compact footprint with industry-standard components
- Connects easily to existing cleanroom facilities
- Minimizes the need for ancillary equipment to handle non-toxic chemicals
- Features ease of maintenance, backed by memsstar’s comprehensive equipment service
- Offers a clear path from R&D/low-volume production to mass production without the need to requalify the process
