Semiconductor Training

Professional training is an important enabler for our customers, to make sure that the skills and knowledge exist within your operation to get the best machine performance and cost of ownership.

memsstar technical training takes place at the customer site, and is delivered after careful consultation to identify the correct training products for your business needs.

Target Audience

Operators, maintenance technicians, equipment engineers, process engineers, development engineers, and health & safety practitioners. Courses include up to 8 students per class, with training ideally split between classroom and access to equipment.

Training Material

All of our training material is created by memsstar based upon our wealth of experience and knowledge, and is delivered by fully qualified and certified technical trainers. Students will receive hard and soft copy of materials, and can be assessed during training if required. Attainment certification will be supplied.

Semiconductor Training Course Structure

Customers select a platform and/or chambers as the subject of the course, and then a level to which the training is targeted, and finally which modules should be included.

Platforms
150mm, 200mm
AMAT – P5000, Centura, Endura
Lam – Rainbow, Alliance
Novellus – Concept One (C1), Concept Two (C2)
300mm
Endura/Endura 2

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Basic operation and basic theory
Level 1 – Basic maintenance and preventative maintenance
Level 2 – Advanced maintenance and fault finding

150mm/200mm

Applied Materials P5000/Centura/Endura

Module

Days

Comments

Tungsten 1 Basic
Tantalum
(Nitride)
1 All variations
Copper 1 All variations
Titanium
(Nitride)
1 All variations
Preclean 1
Reactive Preclean 1
CVD TiN TxZ 2 Purge, cool down, major PM
Mainframe 2
HP+/VHP+ Robot 2 Handoffs, full bearing PM
Standard/WB/NB loadlocks 2 Setup, fault finding
Basic Process 2 Etch, PVD and CVD
MxP/MxP+ 2 Etch hardware
DPS 2 Etch hardware
DxZ, DxL 2 CVD hardware
P5000 frame, robot 3 All variations, calibrations and setups

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Lam Research Alliance and Rainbow Training

Module

Days

Comments

4420 chamber 1 All variations
4520 chamber 1 All variations
4520 isotropic module 1 All variations
9400 chamber 1 All variations
9600 chamber 1 All variations
DSQ chamber 2
Basic process 2 All variations
Mainframe 1 Basic

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Novellus C1 and C2 Training

Module

Days

Comments

C1 mainframe 1 Basic
Process chamber 1 All variations
C1 handling 1 All variations
C2 DLCM 1 All variations
SPEED chamber 1 All variations
ALTUS chamber 2
Basic process 2 All variations

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Applied Materials 300mm Endura/Endura 2 Training

Module

Days

Comments

Clean Tungsten 1
Aluminium 1
Cu 1 EnCoRell, RFX
RF PVD 1 Variations
Ti (N) or TA (N) 1 SiP, EnCoRe
PC, RPC 2 XT and XTE
SiCoNi 2 Producer
CVD TxZ 2 STAR control
ALD TaN, TiN 2 Centura
ALPS PVD 1 Ni, Pt, Co, NiPt
Mainframe 2 SWLL inc.
4.0 Fi, 5.3 Fi 2 Kens, TDK, Yasakawa, Brooks, Sinfonia
VHP+ XP 2

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For further information on our semiconductor training, please contact us to discuss your requirements.

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