ORBIS™ Platforms

The new generation of ORBIS platforms enable the most advanced processing capability from research, to commercial R&D through to high-volume manufacturing.

The ORBIS platform approach delivers many benefits to our customers, such as:

• Upgrade paths from R&D through to full-scale production
• Cost-effective solutions—lab or fab
• Seamless process transfer—from lab to fab
• Low cost of ownership

	Orbis 3000 Fully automated wafer handling platform enabling full process integration for volume MEMS production
	ORBIS™ 1000 Single-wafer vacuum loadlock for low-volume MEMS production
	ORBIS™ Alpha™ XeF2 and HF etch development platform for cost-effective MEMS research