Part 2: Material Issues in MEMS Etching Processes
MEMS device fabrication requires a broad range of reactions and chemistries to create the structures and functions of these complicated …
Blog
Part 1: Getting a Handle on MEMS Process Variables
Fabricating MEMS devices presents unique challenges because of the three-dimensional (3D) and mechanical nature of the products. Specific mechanical structures …
memsstar Recognized by Texas Instruments with 2017 Supplier Excellence Award
memsstar Ltd., a leading provider of etch and deposition equipment to manufacturers of semiconductors and micro-electrical mechanical systems (MEMS), has …
Single Wafer vs Batch Wafer Processing
In both semiconductor device and microelectromechanical systems (MEMS) manufacturing, wafer processes are generally divided into single wafer and batch processing. …
memsstar Supports University of Edinburgh MEMS Researchers
memsstar’s close collaboration with the University of Edinburgh has resulted in the first in a series of published MEMS research …
Heterogeneous Integration Versus Dimensional Scaling; One Year In (Part 2)
In the first part of this series, I covered the perspectives of dimensional scaling vs. heterogeneous integration based on discussions …
SEMICON West 2016: Update from the Semiconductor Suppliers
Every year at SEMICON West, in addition to taking in keynotes and technology sessions, I like to catch up with …
As MEMS Hits Its Stride, memsstar Is Ready
Over the last few years, microelectromechanical systems (MEMS) have moved into the mainstream electronics markets as established technologies, and are …
Environmental and Biosensor Technology for MEMS Manufacturing
Biological and environmental sensors offer unique manufacturing challenges beyond those of other MEMS and sensor-based devices. Fundamentally, sensors incorporating merged …
Does MEMS fit into China’s “Made in China” Plan?
Renowned for their high volume product manufacturing capabilities, China is now turning its attention to the technology market. As …
