Recommended Reads
Tech Publications/News Articles:
Solid State Technology – MEMS
Sensors Online
MEMS Net – MEMS news
AZO Nano – MEMS – NEMS News
https://www.azonano.com/nanotechnology-news.aspx?CatID=3
EE Times
All About Circuits – Sensors
https://www.allaboutcircuits.com/latest/sensors/
Semiconductor Engineering – MEMS Market Shifting Article
https://semiengineering.com/mems-market-shifting/
Laboratory for MEMS and Biochips
Organizations/Groups:
MEMS & Sensors Industry Group (MSIG)
http://www.semi.org/en/msig-information-hub
MIPI Alliance
MEMS & Nanotechnology Exchange – Discussion Groups
https://www.mems-exchange.org/MEMS/groups
Semi Foundation
http://www.semi.org/en/semi-foundation-students
Presentation:
MEMS Design – Texas Tech University
http://www.depts.ttu.edu/ntc/researchandpublications/mems/mems_design.php
Journal Articles/White Papers:
“Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy’s speed and accuracy” – Journal
https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5626505/
Whitepapers – Solidus Technology
http://www.solidustech.com/WhitePapers.html
The Advantages of Integrated MEMS to Enable the Internet of Moving Things Whitepaper – mCube
An Overview of MEM Sensors –White Paper – arm Community
https://community.arm.com/soc/b/blog/posts/whitepaper—an-overview-of-mems-sensors
Research:
University Affiliated Research Centers – Army
https://www.arl.army.mil/www/default.cfm?page=510
Micro/Nano Electro Mechanical Systems (MEMS) – UC Berkeley
https://www2.eecs.berkeley.edu/Research/Areas/MEMS/
Center for Intelligent Sensors and MEMS (CISM) in NUS – National University of Singapore
https://www.ece.nus.edu.sg/cism/directors.html
Research – Microsystems, Optoelectronics & Devices – Virginia Tech
https://ece.vt.edu/research/area/optoelectronics
MechE – Boston University
http://www.bu.edu/eng/departments/me/about/meche-affiliations/
MEMS for Biomedical Applications – Research Group – ASU
http://www.public.asu.edu/~jchae2/Home.html
Research Overview – Institute of Microelectronics
https://www.a-star.edu.sg/ime/RESEARCH/MICRO-ELECTRO-MECHANICAL-SYSTEMS-MEMS-RESEARCH.aspx
Intro to MEMS articles:
Overview of MEMS and Research – BYU
https://compliantmechanisms.byu.edu/content/introduction-microelectromechanical-systems-mems
MEMS Introduction article – IoT Agenda
http://internetofthingsagenda.techtarget.com/definition/micro-electromechanical-systems-MEMS