memsstar Completes Installation of Two MEMS Etch Systems for Bosch Next-Generation MEMS Process Development

Livingston, Scotland – November 29, 2016 – memsstar Limited announced today that it has installed two ORBIS ALPHA MEMS etch systems in Bosch’s German research and development facility in Renningen. The systems will be used in Bosch’s development efforts for the next generation of MEMS devices. Introduced in 2014, ORBIS systems deliver the industry’s most advanced single-wafer process capability for advanced MEMS manufacturing. memsstar is a leading provider of etch and deposition equipment and technology solutions to manufacturers of semiconductors and micro-electrical mechanical systems.

“With the anticipated growth in the MEMS market, MEMS manufacturing must advance rapidly to address emerging market requirements,” said Tony McKie, CEO of memsstar. “The need for high-performance MEMS devices is driving new development efforts to reduce process variations, and improve uniformity and reliability. The ALPHA system brings our unique, production-proven processing technology to R&D facilities to accelerate MEMS process development. Bosch is one of the major innovators in MEMS devices and we are delighted to play a part in Bosch’s future products.”

The ORBIS platform is an enabling technology for next-generation MEMS manufacturing. It includes fully integrated process monitoring and endpoint control, a high-selectivity package and a proven hardware that delivers excellent uniformity and repeatability, critical to improving yield. The ALPHA was designed for R&D facilities and is based on memsstar’s production-proven continuous-flow processing technology. This combination of benefits enables advanced process development on a cost-effective platform.

memsstar Limited
memsstar Limited is a leading provider of deposition and etch equipment and technology products and services to manufacturers of semiconductors and micro-electrical mechanical systems (MEMS). The company’s remanufactured etch and deposition equipment and its proprietary technology solutions support the European semiconductor market and the global MEMS market. memsstar delivers proprietary process technology and equipment to help the MEMS industry meet the challenges of developing and manufacturing increasingly complex and integrated MEMS devices. ISO 9001 certified, memsstar is recognized for its remanufacturing excellence, technology development, process guarantees, as well as extensive service capabilities to support its full range of OEM and remanufactured equipment.

The Bosch Group
The Bosch Group is a leading global supplier of technology and services. It employs roughly 375,000 associates worldwide (as of December 31, 2015). The company generated sales of 70.6 billion euros in 2015. Its operations are divided into four business sectors: Mobility Solutions, Industrial Technology, Consumer Goods, and Energy and Building Technology.

The Bosch Group comprises Robert Bosch GmbH and its roughly 440 subsidiaries and regional companies in some 60 countries. Including sales and service partners, Bosch’s global manufacturing and sales network covers some 150 countries. The basis for the company’s future growth is its innovative strength. Bosch employs 55,800 associates in research and development at 118 locations across the globe. The Bosch Group’s strategic objective is to deliver innovations for a connected life. Bosch improves quality of life worldwide with products and services that are innovative and spark enthusiasm. In short, Bosch creates technology that is “Invented for life.”

The company was set up in Stuttgart in 1886 by Robert Bosch (1861-1942) as “Workshop for Precision Mechanics and Electrical Engineering.” The special ownership structure of Robert Bosch GmbH guarantees the entrepreneurial freedom of the Bosch Group, making it possible for the company to plan over the long term and to undertake significant up-front investments in the safeguarding of its future. Ninety-two percent of the share capital of Robert Bosch GmbH is held by Robert Bosch Stiftung GmbH, a charitable foundation. The majority of voting rights are held by Robert Bosch Industrietreuhand KG, an industrial trust. The entrepreneurial ownership functions are carried out by the trust. The remaining shares are held by the Bosch family and by Robert Bosch GmbH.

The new Bosch research campus in Renningen was completed in 2015 following an investment of approximately €310 million. The campus covers an area of 100 hectares and includes 14 high rise buildings, of which 11 laboratory and workshop buildings. There are 1,400 associates on site.

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