Upgrade Services

Reducing cost of ownership and extending systems lifetime is critical for our customers. memsstar helps customers achieve this by leveraging our extensive in-house experience in systems design and build.

  • Replacement of obsolete parts with qualified alternatives.
  • Recommended productivity gains through hardware replacement

memsstar offers extensive productivity enhancements for Applied Materials, Lam and Novellus etch and deposition systems.

Applied Materials:

Productivity EnhancementCentura
OTF center finderYesYes
Zero adjust slit valve - reduced particle levels and maintenance.Yes
Direct drive throttle valve - reduced maintenance and COOYesYes
Chamber liners & swap kitsYesYes
Remote plasma clean systems - reduced particles, better MWBC.YesYes
Simplified CVGF for DxL and DxZ chambers for reduced COO and maintenance. Eliminates quartz tubes and resistor sleeves.YesYes
Clamp to ESC upgradesYesYes
Polymide to ceramic ESC upgradesYesYes
Shutter assy for TTN PVD processesYes
Upgrade Cryo's 3Ph enhanced, low vibration, longer between regens.Yes
Target water flow switch interlockYes
Enhanced cryo cooling baffle, eliminate cryo elbow, reduce pm time.Yes
3 position gate valve, high pressure applications.Yes
Clear lids for pass-throughYes
Clean cool pedestal, eliminates wafer slideYes
Degas lid hingeYes
Degas temperature monitorYes
PCII process kit improvementYes
Duraseal slit valvesYes
Fast vent loadlockYes
Loadlock wafer out of slot senseYes
Transfer/Buffer lid hoistYes
SBC Repair/Exchange & Testing LoopYesYesYesYes
Heat Exchanger/Chiller Repair LoopYesYesYesYes
New Solid State Chiller Replacement UpgradesYesYesYesYes
DC Power Supply, RF Generator and RPS Repair LoopYesYesYesYes
RF Generator UpgradesYesYesYesYes
DxZ Lift Driver Upgrade - In DevelopmentYesYes
VME Power Supply Replacement - In developmentYesYesYes
Reinforced High Temp Heat Exchanger Hoses PackYesYesYesYes
New Replacement Interconnect Umbilicals & HarnessesYesYesYesYes
Ceramic ESC Replacement for Polymide ESCsYesYes
Visible Light Orienter Upgrade Kit to protect against obsolete LEDsYesYesYesYes
Solid state flash hard driveYesYesYesYes
Compact flash, floppy drive replacementYesYesYesYes
Flat screens and light pen emulatorsYesYesYesYes
Advanced Process Control SolutionYesYesYesYes
HSMS (Standard)YesYesYes
HSMS (Non-standard)YesYesYesYes
P5000 Ethernet ConnectivityYes
RF Based EndpointYesYes
Ultra Fast MFCs - In developmentYesYesYesYes
Gas Line Thermal ControlYesYesYes
Clear Wafer Orienter - In developmentYesYesYesYes
Ultra Uniform Ceramic ESC for Etch - In developmentYesYes

Applied Materials Obsolescence Protection
Applied Materials Technology Enabling Upgrades
Data and Connectivity Improvements

Find out more about Applied Materials remanufacturing services.

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Lam Alliance and Rainbow Platform Productivity Enhancements

  • Process station software
  • Envision system LCD & maintenance terminal for rear system control
  • Classic system hard disk replacement with flash drive & floppy drive to USB drive
  • Envision touch screen
  • DC power supply replacement
  • Classic to Envision upgrade
  • ESC upgrade
  • ESC refurbishment
  • Size conversion
  • Stepper upgrade
  • Solenoid upgrade

Find out more about Lam Alliance and Rainbow platform remanufacturing services.

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Novellus Concept One and Concept Two Platform Productivity Enhancements

  • Process station software
  • 70 volt robot and drivers
  • Digital Eurotherm heater controller
  • Ferrofluidic seal
  • Load lock door shaft
  • Megapac 7 channel DC power supply upgrade
  • AC2/ACR28 to new Nor-Cal throttle valve and controller
  • Flat screens
  • New RF strap design
  • RF match and generator upgrades (PDX 1400 and AE 5500)
  • Main AC heater circuit breaker upgrades

Find out more about Novellus Concept One and Concept Two Platform remanufacturing services.

For further information on our semiconductor upgrade services or to discuss your own specific requirements, please contact us.

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