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0010-38107

COVER, METAL, DXZ DCVD, ASSEMBLY (2nd source)

0090-35057

Lift cylinder (refurished)

0020-23180

pedestal

Part # 15391

RFDS1250-A generator (refurbished)

Part # 15389

Edwards turbo pump STP-H1303C

0029-35598

focus ring

Part # 14103

P5000 chamber C foreline (?)

0200-10243

SHADOW RING, QUARTZ, 150MM, FLAT (1S)

716-011830-006

focus ring

Part # 13717

RFG1250 generator

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