memsstar Specializes in Applied Materials™ Centura Etch and Deposition, Endura Deposition and P5000 Platforms

As the leading remanufacturer of Applied Materials process equipment serving markets across Europe, Asia and the USA, memsstar delivers the broadest capability set for the like-new refurbishing, repurposing or process development to support etch and deposition processes for mainstream semiconductor manufacturing or novel applications.

Applied Materials Etch, CVD, PVD, RTP, Epi
Centura 5200 and Endura 5500, P5000

Centura Applications
DPS metal and poly and ASP+
DxZ nitride, TEOS and other
HDP Ultima and Ultima+
HeWeB and WxP
Reduced pressure and atmospheric epitaxy
MxP, MxP+, eMxP+ and SuperE
SiNgen and Polygen
WxZ
XE, XE+ and Radiance

Endura Applications
Aluminum, Ti, TiN, Ta, TaN, TxZ, Cu, MoSi, W, Au, SiCr, AlN, Pt, etc.
IMP, SiP, standard and widebody, 101, clamped, ESC
Preclean II

P5000 Applications
DxZ nitride, TEOS and other
DxL lamp-heated nitride, TEOS and other
HeWeb and WxP
Mark II, MxP, MxP+ and eMxP+
WxZ
WxL

memsstar supports Centura, Endura and P5000 Systems:

  • Equipment support, process development, expert consulting
  • Chamber additions, moves, wafer size changes
  • Process retargeting and applications design
  • Asset management
  • Spare parts inventory
  • Training
  • CE EH&S engineering
  • CVD/PVD Heater ReNEW
  • P5000 robot rebuild
  • Complete installations, start up and process support, including full warranty
  • On-site service

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