WELCOME TO MEMSSTAR TECHNOLOGY

LEADING TECHNOLOGY PROCESSING FOR MEMS

memsstar®  delivers leading performance for;

Dry Isotropic Etching  VHF and XeF2 tools

Surface Modification - robust, ultra thin coatings tools

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FEATURED CONTENT

Surface Preparation and Deposition

Memsstar SPD enables surface micro engineering using the latest nanotechnology material ...

Sacrificial Vapour Release

memsstar SVR is unique technology using gas phase etching and advanced process controls ...

Integration

A common technique used in semiconductor fabrication is the use of cluster tools ...