Home

Semiconductor

slide-2-960x600

memsstar is a premier semiconductor equipment remanufacturer and services provider. The company refurbishes and re-manufactures tools to the original equipment manufacturer’s specification, as well as repurposes those tools for novel applications, to deliver the industry’s best etch and deposition process solutions. Find out more about our semiconductor products and services.

MEMS

slide-21-960x600-1

memsstar serves the global MEMS marketplace, offering etch and deposition expertise, experience, proprietary and remanufactured systems and know-how to deliver innovative products and services for research, commercial R&D and production. Discover how our MEMS technology can help your business.

  • Environmental and Biosensor Technology for MEMS Manufacturing

    biosensor technology vapor phase etching
    Biological and environmental sensors offer unique manufacturing challenges beyond those of other MEMS and sensor-based devices. Fundamentally, sensors incorporating merged technologies of this kind can still be considered as two distinct components – a mechanical device with an added bio …
    Read more

ORBIS™ ALPHA™ Platform:
Standalone process module

ORBIS ALPHA HF and XeF2 etch development platform

featured_device_1

ORBIS™ 1000 platform:
Single wafer vacuum loadlock

ORBIS 1000 single-chamber platform for low-volume MEMS production

ORBIS 1000

ORBIS™ 3000 platform:
Single cassette cluster tool

ORBIS 3000 multi-chamber platform proven in high-volume MEMS manufacturing

mems

Applied Materials™
P5000, Centura and Endura

memsstar specializes in remanufactured Applied Materials etch and deposition platforms

mems

Lam Research:
Rainbow and Alliance

memsstar specializes in remanufactured Lam Research etch platforms

mems

Novellus:
Concept One and Concept Two

memsstar specializes in remanufactured Novellus deposition platforms

mems