Semiconductor Equipment Parts

memsstar is an industry leading provider of semiconductor equipment parts.

Our extensive inventory has over 5,000 semiconductor components featuring Lam Research parts: 2300, Rainbow and Alliance; Novellus C1 and C2; and AMAT parts: Endura PVD, CVD, Centura Etch, CVD, RPD and P5000 for Etch and CVD applications. A global distribution network means that we are able to provide fast and efficient shipment of equipment parts worldwide.

We are also European market leaders in the remanufacturing of used semiconductor equipment for Applied Materials (AMAT), Lam Research and Novellus. Please visit our Remanufactured Systems and Chambers.

Can’t find the semiconductor part you need? Please contact us at: spares@memsstar.com and we will endeavour to source the spare parts required at the best available price.

memsstar: Semiconductor equipment parts for etch and deposition distributed globally at competitive prices. 

Search parts

Qty
Part Number
Description
Condition
Qty required
*
screws
Used

1
Tylan cable (8 ft)
Used

1
Tylan Throttle Valve Ca...
Used

1
Tylan cable
Used

1
0-ACR Tylan cable 18”
Used

1
18” Tylan cable
Used

1
MFC ribbon cable
Used

1
Clamp vespel
New

1
throttle valve
Used

1
5000 etch bearing
Used

1
P5000 etch bearing std
Used

1
actuator lift
Used

1
top lid bolt down
Used

1
Slit valve actuator uni...
Used

1
monocromator
Used

1
ASSY, CATHODE LINER, MA...
New

1
ASSY, CATHODE LINER, MA...
New

1
ASSY, BABPSG 8'' - 6'' ...
Refurb

1
Centura 1 AC electrical...
Used

1
Used

1
Throttle valve assy, et...
Used

1
Throttle valve CVD
New

1
2-phase stepper motor c...
Used

1
Susceptor lift Drive
Used

1
Wafer Lift Drive
Used

1
ASSY, DC POWER SUPPLY
Used

1
ASSY 15 VOLT POWER SUPPLY
Used

1
Lamp module
Used

1
wafer list
Used

1
wafer lift
Used